R&D Project
Development of domestic production technology for high-purity industrial water EPC-O&M 2021
The majority of the ultra-pure water production process equipment for domestic semiconductors is supplied by Japan, and the equipment used in the ultra-violet oxidation process within the ultra-pure water production process is also mostly made in Japan and the United States.
환경부의 지원으로 주식회사 에코셋이 총괄주관연구기관으로, 고려대학교와 그외 협력 업체들과 함께 수행하는 “AIoT 기반 ASTM D5127 E-1.3급 고순도 공업용수용 자외선 산화장치 개발”사업은 그동안 해외 의존도가 높은 고순도 공업용수의 자외선 산화설비와 설계 기술을 국산화하기 위한 목적으로 21년 4월에 개발 사업을 착수하였다.
As semiconductors become more precise and integrated, the demand for high-quality industrial water is increasing day by day.
Ultraviolet oxidation equipment for high purity industrial water
The ultraviolet oxidation equipment for high-purity industrial water reduces the TOC (Total Organic Carbon) concentration in the ultra-pure water (high-purity industrial water) production process by irradiating ultra-pure water with ultraviolet rays of the VUV wavelength with strong energy to photolyze water molecules, thereby generating hydroxyl radicals (OH Radicals) to oxidize and remove organic carbon in ultra-pure water by converting it into carbonate or bicarbonate.
Through this research and development project, Ecoset Co., Ltd. plans to complete a self-diagnosis control system by incorporating AIoT (Artificial Intelligence of Things) into ultraviolet oxidation equipment to solve the problems of existing industrial water ultraviolet oxidation equipment, namely the generation of hydrogen peroxide and increase in DO caused by excessive VUV irradiation, rather than simply localizing the equipment to the same level as imported equipment.
Through this, we plan to enter the global market in this field by eliminating the high dependence on overseas countries for high-purity industrial water production facilities, strengthening the import substitution effect and national technological competitiveness, and securing superior technological capabilities compared to major overseas competitors.